THE THERMODYNAMIC PROPERTIES OF TETRAETHOXYSILANE (TEOS) AND AN INFRARED STUDY OF ITS THERMAL-DECOMPOSITION

Authors
VANDERVIS MGM CORDFUNKE EHP KONINGS RJM
Citation
Mgm. Vandervis et al., THE THERMODYNAMIC PROPERTIES OF TETRAETHOXYSILANE (TEOS) AND AN INFRARED STUDY OF ITS THERMAL-DECOMPOSITION, Journal de physique. IV, 3(C3), 1993, pp. 75-82
Citations number
29
Categorie Soggetti
Physics
Journal title
Journal de physique. IV → ACNP
ISSN journal
11554339
Volume
3
Issue
C3
Year of publication
1993
Pages
75 - 82
Database
ISI
SICI code
1155-4339(1993)3:C3<75:TTPOT(>2.0.ZU;2-0
Abstract
A review is given on the determination of the thermodynamic properties of Si(OC2H5)4 (TEOS, tetraethoxysilane). In addition, the thermal dec omposition of TEOS has been studied by in-situ IR spectroscopy. The de composition products in the gas phase in the absence of oxygen are org anic fragments (ethanol, ethanal, ethene, methane, carbon monoxide), a nd in the presence of oxygen water, carbon dioxide, ethanal and methan al. The results are compared with thermodynamic equilibrium calculatio ns and kinetic models.