HEAT-TRANSFER STUDIES IN COLD CVD REACTORS USING HOLOGRAPHIC-INTERFEROMETRY

The evaluation of holographic interferograms has been reviewed to perf orm quasi-real time and more accurate measurements of temperature fiel ds within CVD reactors. In this way a powerful image processing device has been annexed to our optical arrangement to perform suitable and f ast data acquisition. The evaluation of holographic interferograms is achieved using Fast Fourier Transform algorithm. Temperature fields ha ve been measured within a large cold wall CVD reactor for different cy lindrical substrate diameters and also for a conic substrate. We prese nt some useful empirical correlations between Nusselt and Rayleigh num bers. Our aim in this paper is to give some useful experimental data w hich could be used to improve the validity of mathematical models deve loped for CVD process.