MONTE-CARLO SIMULATION ON THE STEP COVERAGE FORMATION PROCESSES IN CHEMICAL-VAPOR-DEPOSITION

Authors
SHIMOGAKI Y UCHIDA T SHIGA S EGASHIRA Y KOMIYAMA H
Citation
Y. Shimogaki et al., MONTE-CARLO SIMULATION ON THE STEP COVERAGE FORMATION PROCESSES IN CHEMICAL-VAPOR-DEPOSITION, Journal de physique. IV, 3(C3), 1993, pp. 203-203
Citations number
NO
Categorie Soggetti
Physics
Journal title
Journal de physique. IV → ACNP
ISSN journal
11554339
Volume
3
Issue
C3
Year of publication
1993
Pages
203 - 203
Database
ISI
SICI code
1155-4339(1993)3:C3<203:MSOTSC>2.0.ZU;2-X