COMPARATIVE-STUDY OF COPPER-DEPOSITS OBTAINED BY THERMAL-DECOMPOSITION AND PHOTO-ASSISTED CHEMICAL-VAPOR-DEPOSITION OF 3-DIKETONATE COMPLEXES

The use of the Ba(thd)2 precursor, in the elaboration of thin supercon ductor layers by OMCVD, is not satisfactory because its volatility dec reases when it is kept at the sublimation temperature during the depos ition. In order to avoid this problem, fluorine complexes, such as Ba( hfa)2 can be used. Nevertheless, its thermal decomposition at high tem perature induces the presence of baryum fluoride, which is harmful for obtaining superconductor films with high critical temperature. This w ork is aiming to study the elaboration of superconducting deposits at low temperature and without fluorine. We have undertaken a program bas ed on a photo-assisted thermal decomposition of various organometallic compounds, which are used as precursors of superconductor layers. Pho tonic assistance enables to obtain copper deposits at 150-degrees-C. T he results of the photo-assisted decomposition of Cu(thd)2 and Cu(hfa) 2 are presented here.