NEW PRINCIPLE OF FEEDING FOR FLASH EVAPORATION MOCVD DEVICES

Authors
KAUL AR SELEZNEV BV
Citation
Ar. Kaul et Bv. Seleznev, NEW PRINCIPLE OF FEEDING FOR FLASH EVAPORATION MOCVD DEVICES, Journal de physique. IV, 3(C3), 1993, pp. 375-378
Citations number
3
Categorie Soggetti
Physics
Journal title
Journal de physique. IV → ACNP
ISSN journal
11554339
Volume
3
Issue
C3
Year of publication
1993
Pages
375 - 378
Database
ISI
SICI code
1155-4339(1993)3:C3<375:NPOFFF>2.0.ZU;2-Q
Abstract
A novel scheme of flash evaporation feeding for MOCVD processes of mul ticomponent oxide films deposition is proposed. The scheme comprises 1 ) microdozage of organic solution of solid volatile precursors on the glass fiber belt, 2) evaporation of the solvent and 3) flash evaporati on of MOC microdoses from the belt. The functioning of the designed fe eder is described and the features of proposed scheme in comparison to existing feeding principles are discussed.