RARE-EARTH BETA-DIKETONATE AND CARBOXYLATE METAL-COMPLEXES AS PRECURSORS FOR MOCVD OF OXIDE-FILMS

Authors
KUZMINA NP MARTYNENKO LI TU ZA KAUL AR GIRICHEV GV GIRICHEVA NI RYKOV AN KORENEV YM
Citation
Np. Kuzmina et al., RARE-EARTH BETA-DIKETONATE AND CARBOXYLATE METAL-COMPLEXES AS PRECURSORS FOR MOCVD OF OXIDE-FILMS, Journal de physique. IV, 3(C3), 1993, pp. 385-390
Citations number
12
Categorie Soggetti
Physics
Journal title
Journal de physique. IV → ACNP
ISSN journal
11554339
Volume
3
Issue
C3
Year of publication
1993
Pages
385 - 390
Database
ISI
SICI code
1155-4339(1993)3:C3<385:RBACMA>2.0.ZU;2-I
Abstract
Volatile and thermostable complexs of lanthanide acetylacetonates and pivalates were obtained and investigated by different methods. These c ompounds were used for lanthanide oxide containing film producing and for fabrication of silica optical fibers doped by lanthanide oxide. Th e properties of these and already known volatile precursors are compar ed.