PHYSICAL AND TRIBOLOGICAL PROPERTIES OF A-SI1-XCX-H COATINGS PREPAREDBY RF PLASMA-ASSISTED CHEMICAL-VAPOR-DEPOSITION

Authors
SMEETS J MENEVE J JACOBS R EERSELS L DEKEMPENEER E
Citation
J. Smeets et al., PHYSICAL AND TRIBOLOGICAL PROPERTIES OF A-SI1-XCX-H COATINGS PREPAREDBY RF PLASMA-ASSISTED CHEMICAL-VAPOR-DEPOSITION, Journal de physique. IV, 3(C3), 1993, pp. 503-510
Citations number
23
Categorie Soggetti
Physics
Journal title
Journal de physique. IV → ACNP
ISSN journal
11554339
Volume
3
Issue
C3
Year of publication
1993
Pages
503 - 510
Database
ISI
SICI code
1155-4339(1993)3:C3<503:PATPOA>2.0.ZU;2-O
Abstract
a-Si1-xCx:H films deposited by r.f. plasma-assisted chemical vapour de position were studied as a function of their composition. The friction and wear properties were investigated with the help of a conventional ball-on-disc apparatus. These results are correlated with chemical (S i/C atomic ratio) and structural (Raman and infrared spectroscopy) pro perties. The friction coefficient in a humid ambient atmosphere change s markedly with the carbon fraction and reaches a value as low as 0.05 for coatings with 70 to 90 at.% C. The carbon-rich films consist of d iamond-like carbon with silicon.