CHEMICAL-VAPOR-DEPOSITION OF PYROLYTIC CARBON ON POLISHED SUBSTRATES

Pyrolytic carbon thin (4-100 nm) films were obtained from methane in a hot wall reactor on optically polished inert substrates by varying th e deposition time and temperature. They were characterized by all mode s of TEM. They are composed in majority of lamellar pyrocarbon whose t hickness and disorder increases with increasing temperature. Isotropic carbon islands are also observed at the upper surface of the film.