ION-ASSISTED CVD OF GRADED DIAMOND-LIKE CARBON (DLC) BASED COATINGS

Graded DLC based coatings and multilayers for wear resistance applicat ions have been produced using a novel hybrid unbalanced magnetron sput tering/ low pressure CVD system. The main features of this highly flex ible and scalable process are discussed. These films have been charact erised using a variety of techniques including SEM, microhardness, adh esion, wear rate and lifetime tests. For example: microhardness of > 4 000 Hv; excellent adhesion, Lc 115-125 N; coefficient of friction duri ng prolonged running against WC of 0.15; volumetric wear rates 1/5 of that of TiN. The process is ideally suited to large substrate size and volume production for many different kinds of applications.