PC-BASED DIGITAL APPARATUS WITH TEMPERATURE COMPENSATION FOR MEASUREMENT OF THIN-FILMS DURING DEPOSITION

Authors
GENEROSI R BARCHESI C LUCE M CRICENTI A
Citation
R. Generosi et al., PC-BASED DIGITAL APPARATUS WITH TEMPERATURE COMPENSATION FOR MEASUREMENT OF THIN-FILMS DURING DEPOSITION, Review of scientific instruments, 64(10), 1993, pp. 2952-2953
Citations number
13
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
Journal title
Review of scientific instruments → ACNP
ISSN journal
00346748
Volume
64
Issue
10
Year of publication
1993
Pages
2952 - 2953
Database
ISI
SICI code
0034-6748(1993)64:10<2952:PDAWTC>2.0.ZU;2-0
Abstract
We present an apparatus for controlling the deposition of thin films. The apparatus is based on a quartz resonator whose frequency is contro lled digitally by a computer. Temperature variations of the quartz dur ing the evaporation process, attributed to the exothermic heat of cond ensation and radiation heating from the evaporation source, are compen sated. A very stable deposition rate and a good film thickness evaluat ion are obtained.