ION-MATRIX SHEATH IN A CYLINDRICAL BORE

Authors
Citation
Te. Sheridan, ION-MATRIX SHEATH IN A CYLINDRICAL BORE, Journal of applied physics, 74(8), 1993, pp. 4903-4906
Citations number
6
Categorie Soggetti
Physics, Applied
Journal title
ISSN journal
00218979
Volume
74
Issue
8
Year of publication
1993
Pages
4903 - 4906
Database
ISI
SICI code
0021-8979(1993)74:8<4903:ISIACB>2.0.ZU;2-G
Abstract
The potential structure, electric field, and sheath width for the ion- matrix sheath in a cylindrical bore are calculated. The appropriate sc aling length for this problem is found to be square-root 2 times large r than the planar ion matrix sheath width. If the radius of the bore i s less than this scaling length, then the sheaths from ''opposite'' si des of the bore overlap, and the potential drop from the axis to the s idewalls decreases with the square of the bore radius. This limits the maximum energy of ions impacting the target. For bores larger than th is scaling length, the asymptotic planar solutions are rapidly approac hed.