The characteristic ionization energies, barriers associated with captu
re, energy levels, and introduction rates of the various electron and
hole traps introduced by electron irradiation in n-type GaP are determ
ined using deep level transient spectroscopy. The same traps are creat
ed after 4 or 300 K irradiation. Their introduction rates correspond t
o those expected for primary displacements. From the similarity to the
case of GaAs, we conclude that the corresponding defects are intrinsi
c defects (isolated vacancies and vacancy interstitial pairs) associat
ed with the P (electron traps) and Ga (hole traps) sublattices.