AN NMR-STUDY OF THE STEP-BY-STEP PYROLYSIS OF A POLYSILAZANE PRECURSOR OF SILICON-NITRIDE

Authors
BRODIE N MAJORAL JP DISSON JP
Citation
N. Brodie et al., AN NMR-STUDY OF THE STEP-BY-STEP PYROLYSIS OF A POLYSILAZANE PRECURSOR OF SILICON-NITRIDE, Inorganic chemistry, 32(21), 1993, pp. 4646-4649
Citations number
26
Categorie Soggetti
Chemistry Inorganic & Nuclear
Journal title
Inorganic chemistry → ACNP
ISSN journal
00201669
Volume
32
Issue
21
Year of publication
1993
Pages
4646 - 4649
Database
ISI
SICI code
0020-1669(1993)32:21<4646:ANOTSP>2.0.ZU;2-4