SI C/F/H MATERIALS FROM LASER-EXPLOSIVE DECOMPOSITION OF FLUOROMETHYLSILANES/

Solid Si/C/H/F materials laser-deposited from gaseous fluoro-methylsil anes are examined by XPS, SEM, IR and Raman spectroscopy and revealed to be a blend of silicon-carbon-based frameworks, possessing some Si-H and C-H bonds, and carbon whose modification is dependent on the stru cture of the parent fluoromethylsilane. Their properties are affected by contact with the atmosphere: although incorporation of oxygen into silicon-carbon frameworks is a very fast process, the dramatically imp roved adhesion to aluminium requires long exposure periods.