STRUCTURE AND PROPERTIES OF MULTICOMPONENT AND MULTILAYER HARD COATINGS OBTAINED BY THE BIAS ACTIVATED REACTIVE EVAPORATION METHOD

Authors
MARKOWSKI J PRAJZNER A ZDANOWSKI J MASSELI K
Citation
J. Markowski et al., STRUCTURE AND PROPERTIES OF MULTICOMPONENT AND MULTILAYER HARD COATINGS OBTAINED BY THE BIAS ACTIVATED REACTIVE EVAPORATION METHOD, Surface & coatings technology, 60(1-3), 1993, pp. 450-453
Citations number
4
Categorie Soggetti
Material Science
Journal title
Surface & coatings technology → ACNP
ISSN journal
02578972
Volume
60
Issue
1-3
Year of publication
1993
Pages
450 - 453
Database
ISI
SICI code
0257-8972(1993)60:1-3<450:SAPOMA>2.0.ZU;2-J
Abstract
The paper presents investigations of the structure and properties of m ulticomponent and multilayer hard coatings based on Ta, Mo, Ti, W, Al and their nitrides, obtained using standard and improved bias activate d reactive evaporation methods. The results of secondary ion mass spec trometry investigation as well as X-ray diffraction and energy-dispers ive analysis of X-rays are presented. The potentiokinetic curves of de posited layers are also shown.