LOW-TEMPERATURE PREPARATION AND PROPERTIES OF SPINEL-TYPE IRON-OXIDE FILMS BY ECR PLASMA-ENHANCED METALORGANIC CHEMICAL-VAPOR-DEPOSITION

Spinel-type iron oxide films (Fe3O4) have been prepared on soda-lime g lass substrates by ECR plasma-enhanced Metalorganic Chemical Vapor Dep osition (MOCVD) using Iron (III) acetylacetonato complex [Fe(C5H7O2)3] or ferrocene [Fe(C5 H2)2] as the source-material. The X-ray diffracti on pattern, Auger spectrum and conversion electron Mossbauer spectrum indicated that high-crystallinity and carbon-free Fe3O4 film was obtai ned at a low temperature of 150-degrees-C using ferrocene as the soruc e material. SEM images showed that the film had a smooth surface and a columnar structure. Magnetization curves measured by VSM indicated th at the film had no definite magnetic anisotropy.