SPECTROSCOPIC IR ELLIPSOMETRY WITH IMPERFECT COMPONENTS

Authors
DENBOER JHWG KROESEN GMW HAVERLAG M DEHOOG FJ
Citation
Jhwg. Denboer et al., SPECTROSCOPIC IR ELLIPSOMETRY WITH IMPERFECT COMPONENTS, Thin solid films, 234(1-2), 1993, pp. 323-326
Citations number
4
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
Thin solid films → ACNP
ISSN journal
00406090
Volume
234
Issue
1-2
Year of publication
1993
Pages
323 - 326
Database
ISI
SICI code
0040-6090(1993)234:1-2<323:SIEWIC>2.0.ZU;2-L
Abstract
In this paper the effect of imperfect components in a spectroscopic IR ellipsometer on the ellipsometer behaviour is investigated. Polarizer s, source and detector are described by Mueller matrices. A possibilit y of constructing better wire grid polarizers is discussed. Calculatio ns are performed analytically, leading to new criteria for the calibra tion of a spectroscopic ellipsometer.