A. Gombert et al., DETERMINATION OF THE REFRACTIVE-INDEX OF METAL-CERAMIC COMPOSITES ANDTHEIR COMPONENTS BY SPECTROSCOPIC ELLIPSOMETRY AND EFFECTIVE-MEDIUM THEORIES, Thin solid films, 234(1-2), 1993, pp. 327-331
The optical constants of sputtered molybdenum layers and molybdenum/ti
n oxide cermets in the wavelength range 0.4-7 mum were determined by s
pectroscopic ellipsometry. The results were used for the evaluation of
a suitable effective medium theory to describe cermets produced by a
batch sputtering deposition system. In a following step, application o
f the effective medium theory to the refractive index of a cermet with
low metal content allowed estimation of the optical constants of the
embedded molybdenum particles.