DETERMINATION OF THE REFRACTIVE-INDEX OF METAL-CERAMIC COMPOSITES ANDTHEIR COMPONENTS BY SPECTROSCOPIC ELLIPSOMETRY AND EFFECTIVE-MEDIUM THEORIES

Authors
GOMBERT A GRAF W HEINZEL A JOERGER R KOHL M WEIMAR U
Citation
A. Gombert et al., DETERMINATION OF THE REFRACTIVE-INDEX OF METAL-CERAMIC COMPOSITES ANDTHEIR COMPONENTS BY SPECTROSCOPIC ELLIPSOMETRY AND EFFECTIVE-MEDIUM THEORIES, Thin solid films, 234(1-2), 1993, pp. 327-331
Citations number
13
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
Thin solid films → ACNP
ISSN journal
00406090
Volume
234
Issue
1-2
Year of publication
1993
Pages
327 - 331
Database
ISI
SICI code
0040-6090(1993)234:1-2<327:DOTROM>2.0.ZU;2-F
Abstract
The optical constants of sputtered molybdenum layers and molybdenum/ti n oxide cermets in the wavelength range 0.4-7 mum were determined by s pectroscopic ellipsometry. The results were used for the evaluation of a suitable effective medium theory to describe cermets produced by a batch sputtering deposition system. In a following step, application o f the effective medium theory to the refractive index of a cermet with low metal content allowed estimation of the optical constants of the embedded molybdenum particles.