EXTENSION OF SPECTROSCOPIC ELLIPSOMETRY TO THE FAR-INFRARED

The extension of the spectral range of ellipsometry towards the far-in frared region (50-600 cm-1) is possible with a combination of two appr oved methods: Fourier transform spectroscopy and measurements with pol arizers at various azimuths. A detailed description of our automatic i lluminating set-up which allows easy operation at angles of incidence between 10-degrees and 82-degrees. The design of a suitable prism reta rder is shown. Measurements on typical materials in the region of thei r reststrahlen bands are shown together with simulations. Effects of b eam divergence have been taken into account.