POSSIBILITIES AND LIMITATIONS OF ELLIPSOMETRY

Authors
Citation
G. Jungk, POSSIBILITIES AND LIMITATIONS OF ELLIPSOMETRY, Thin solid films, 234(1-2), 1993, pp. 428-431
Citations number
19
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
ISSN journal
00406090
Volume
234
Issue
1-2
Year of publication
1993
Pages
428 - 431
Database
ISI
SICI code
0040-6090(1993)234:1-2<428:PALOE>2.0.ZU;2-G
Abstract
The difficulties in uniquely interpreting optical experiments arise fr om the influence of the sample's surface, spatial dispersion and optic al anisotropy as well as depolarization. The possibilities of ellipsom etry to resolve some of these difficulties are discussed. The most sen sitive ellipsometric arrangement with the simultaneous variation of th e angle of incidence and the polarization of the incident light is pre sented to overcome some of the above objections. The model dependence of the final interpretation of undisputable experimental results will be demonstrated for the interband transition in Al near 1.5 eV.