SPECTROELLIPSOMETRIC CHARACTERIZATION OF LANTHANIDE-DOPED TIO2 FILMS OBTAINED VIA THE SOL-GEL TECHNIQUE

Authors
GARTNER M PARLOG C OSICEANU P
Citation
M. Gartner et al., SPECTROELLIPSOMETRIC CHARACTERIZATION OF LANTHANIDE-DOPED TIO2 FILMS OBTAINED VIA THE SOL-GEL TECHNIQUE, Thin solid films, 234(1-2), 1993, pp. 561-565
Citations number
16
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
Thin solid films → ACNP
ISSN journal
00406090
Volume
234
Issue
1-2
Year of publication
1993
Pages
561 - 565
Database
ISI
SICI code
0040-6090(1993)234:1-2<561:SCOLTF>2.0.ZU;2-U
Abstract
TiO2(Ln) films deposited by the sol-gel and dip coating technique on S i wafers and soda-lime glass as substrates have been characterized by spectroscopic ellipsometry, X-ray photoelectron spectroscopy and Ruthe rford backscattering spectroscopy. Among the various factors that affe ct the optical and structural properties of oxide films we focus in th is paper on the substrate and the lanthanides (La, Eu, Sm, Gd) as dopa nts.