FABRICATION AND PROPERTIES OF EPITAXIAL FERROELECTRIC HETEROSTRUCTURES WITH (SRRUO3) ISOTROPIC METALLIC OXIDE ELECTRODES

Epitaxial ferroelectric SrRuO3/Pb(Zr0.52Ti0.48)O3/SrRuO3 heterostructu res have been fabricated employing isotropic metallic oxide electrodes on (100) SrTiO3 and (100) Si with an yttria stabilized zirconia buffe r layer. The structures have been grown in situ by 90-degrees off-axis sputtering, which allows the growth of uniform stoichiometric films o ver large areas with excellent step coverage. X-ray diffraction, Ruthe rford backscattering spectroscopy, and cross-sectional transmission el ectron microscopy reveal high crystalline quality and coherent interfa ces. They exhibit superior fatigue characteristics over those made wit h metal el showing little degradation over 10(10) cycles, with a large remnant polarization.