METHODS FOR CALCULATING THE OPTICAL CHARACTERISTICS OF THIN METALLIC-FILMS

Authors
BIRYALTSEVA AR NESMELOV EA SAFIN RG
Citation
Ar. Biryaltseva et al., METHODS FOR CALCULATING THE OPTICAL CHARACTERISTICS OF THIN METALLIC-FILMS, Soviet journal of optical technology, 60(9), 1993, pp. 631-633
Citations number
NO
Categorie Soggetti
Optics
Journal title
Soviet journal of optical technology → ACNP
ISSN journal
00385514
Volume
60
Issue
9
Year of publication
1993
Pages
631 - 633
Database
ISI
SICI code
0038-5514(1993)60:9<631:MFCTOC>2.0.ZU;2-T
Abstract
Two methods are examined for calculating the effective parameters that define the optical properties of thin metallic films, allowing for fl uctuations in their thickness on a substrate surface and using multian gle ellipsometric measurements. The concept of a surface with complex conductivity is used for island films, and modified versions of the us ual formulas, taking thickness fluctuations into account, are used for continuous films.