PREPARATION AND OPTICAL WAVE-GUIDE PROPERTIES OF LINBO3 THIN-FILMS BYRF MAGNETRON SPUTTERING

Authors
SHIMIZU M FURUSHIMA Y NISHIDA T SHIOSAKI T
Citation
M. Shimizu et al., PREPARATION AND OPTICAL WAVE-GUIDE PROPERTIES OF LINBO3 THIN-FILMS BYRF MAGNETRON SPUTTERING, JPN J A P 1, 32(9B), 1993, pp. 4111-4114
Citations number
9
Categorie Soggetti
Physics, Applied
Journal title
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS → ACNP
Volume
32
Issue
9B
Year of publication
1993
Pages
4111 - 4114
Database
ISI
SICI code
Abstract
C-axis-oriented LiNbO3 filMS were successfully obtained on ZnO/SiO2/Si , ZnO/glass and Pt/SiO2/Si substrates at substrate temperatures higher than 450-degrees-C by RF magnetron sputtering. LiNbO3 filMS were also grown epitaxially on alpha-Al2O3(001), (012) and (110) and LiTaO3(110 ) substrates at substrate temperatures higher than 650-degrees-C. The minimum optical propagation loss of the films was 6.47 dB/cm (TE0 mode ) for the LiNbO3 film on LiTaO3. An improvement in the optical propaga tion loss after annealing treatment was observed.