S. Schuppler et al., CAN ELECTRICAL DEACTIVATION OF HIGHLY SI-DOPED GAAS BE EXPLAINED BY AUTOCOMPENSATION, Applied physics letters, 63(17), 1993, pp. 2357-2359
Using near-edge x-ray absorption fine structure, the first experimenta
l determination of Si atom concentrations occupying As sites in Si-dop
ed GaAs (100) is reported. The measurements reveal that at high doping
levels (greater than or similar to 10(19) cm-3) in molecular-beam-epi
taxy-grown samples, the number of such p-type Si atoms is insufficient
to account for the observed large reduction of free-carriers.