INTEGRATED NANOFABRICATION WITH THE SCANNING ELECTRON-MICROSCOPE AND SCANNING TUNNELING MICROSCOPE

The combination of electron beam lithography using the scanning electr on microscope (SEM) and direct nanofabrication with the scanning tunne ling microscope (STM) has been used to fabricate a nanometer size link between two prefabricated nanometer size wires. The wires were fabric ated by electron beam lithography using a high resolution SEM. This sa mple was then transferred to a combined SEM and STM instrument which i s used to locate the wires, position them beneath the STM tip, and fab ricate the link using the technique of tip bias pulsing with the STM.