UNCONVENTIONAL IMAGING OF SURFACE-RELIEF

Authors
PEJCHL D MULLEROVA I FRANK L
Citation
D. Pejchl et al., UNCONVENTIONAL IMAGING OF SURFACE-RELIEF, Czechoslovak journal of Physics, 43(9-10), 1993, pp. 983-992
Citations number
8
Categorie Soggetti
Physics
Journal title
Czechoslovak journal of Physics → ACNP
ISSN journal
00114626
Volume
43
Issue
9-10
Year of publication
1993
Pages
983 - 992
Database
ISI
SICI code
0011-4626(1993)43:9-10<983:UIOS>2.0.ZU;2-3
Abstract
The topographic contrast in a scanning electron microscope with very s low electrons is examined in case the cathode lens is used for adjusti ng the landing energy. Measurements are presented regarding the behavi our of planar contrasts at low energies and a significant improvement of the surface detail visualization is demonstrated, together with the possibility of controlling the electron impact angle.