Mp. Seah, SCATTERING IN ELECTRON SPECTROMETERS, DIAGNOSIS AND AVOIDANCE .2. CYLINDRICAL MIRROR ANALYZERS, Surface and interface analysis, 20(11), 1993, pp. 876-890
An analysis is made of the effects leading to an unwanted scattered ba
ckground of electrons in cylindrical mirror analysers (CMAs). This wor
k complements that given in Part I on concentric hemispherical analyse
rs. It is shown that scattering from the middle region of the inner su
rface of the mirror electrode is significant but that the amount of sc
attering reaching the detector may be reduced by reducing the area of
the output slit or by adding a deflection post filter to the optics as
occurs in some commercial instruments. Internal scattering causes a h
igher background so that peak-to-background ratios are attenuated and
transmission function calibrations involve a systematic error. Evidenc
e for this error is a step in the calibration curves for I(E)/En(E) es
tablished earlier. The steps appearing in the curves for Cu and Ag ref
erence samples give a direct measure of the scattering intensity. Cali
bration plots are established for this purpose. Results from previous
interlaboratory comparisons are analysed showing that in commercial CM
As with large-area energy selection slits the scattering may reach 35%
of the copper true background at 950 eV, complicating the subsequent
use of the data. Concentric hemispherical analysers and some commercia
l CMAs show very low scattering. In some CMAs the analogue detection s
ystems cause a similar enhanced background in addition to scattering,
boosting the above figure of 35% to 100%.