There is extensive recent experimental evidence of spontaneous superla
ttice (SL) formation in various II-VI and III-V semiconductors. Here w
e propose an atomistic mechanism responsible for SL formation, and der
ive a relation predicting the temperature, flux, and miscut dependence
of the SL layer thickness. Moreover, the model explains the existence
of a critical miscut angle below which no SL is formed, in agreement
with results on ZnSeTe, and predicts the formation of a platelet struc
ture for deposition onto high symmetry surfaces, similar to that obser
ved in InAsSb. (C) 1997 American Institute of Physics.