INTEGRATED-OPTIC IMPLEMENTATION OF A CONFOCAL SCANNING OPTICAL MICROSCOPE

We demonstrate for the first time a confocal scanning optical microsco pe implemented in an integrated-optic structure. The compact nature of the device proves to be more suitable for environments where mechanic al shock can result in optical misalignment of discrete components. Th e device is implemented in a thin-film optical waveguide with optical fiber connections for light input and output. An objective lens and fo cusing beam splitter is incorporated into the waveguide structure to f orm the sensing head of the microscope. The fabrication of the device is discussed and both intensity and differential contrast images are p resented to demonstrate the device operation. The confocal imaging cha racteristics of the microscope are also demonstrated.