FABRICATION OF REFRACTIVE MICROLENS ARRAYS BY EXCIMER-LASER ABLATION OF AMORPHOUS TEFLON

The fabrication of refractive microlens arrays by the technique of exc imer laser ablation of doped amorphous Teflon combined with the subseq uent annealing and melting of the produced polymer islands is describe d. The microlenses obtained are optically clear from the far UV (190 m ) to the near IR (2000 nm) and are of good optical quality. They vary in size from 50 to 385 mum in diameter with numerical apertures betwee n 0.2 and 0.3. Utilization of these microlenses for material processin g by excimer lasers at 193 nm is demonstrated, and possible applicatio ns are discussed.