EMPIRICAL RELATIONS AMONG SCATTERING, ROUGHNESS PARAMETERS, AND THICKNESS OF ALUMINUM FILMS

Authors
LARRUQUERT JI MENDEZ JA AZNAREZ JA
Citation
Ji. Larruquert et al., EMPIRICAL RELATIONS AMONG SCATTERING, ROUGHNESS PARAMETERS, AND THICKNESS OF ALUMINUM FILMS, Applied optics, 32(31), 1993, pp. 6341-6346
Citations number
10
Categorie Soggetti
Optics
Journal title
Applied optics → ACNP
ISSN journal
00036935
Volume
32
Issue
31
Year of publication
1993
Pages
6341 - 6346
Database
ISI
SICI code
0003-6935(1993)32:31<6341:ERASRP>2.0.ZU;2-W
Abstract
Experimental measurements of the angular distribution of scattering an d scanning electron microscopy Pictures of thin aluminum films were us ed to relate the total integrated scattering and the statistical param eters of the surface roughness to the film thickness.