Results of detailed electron spin resonance (ESR) study of Te doped Al
xGa1-xAs epilayers with x = 0.41, 0.42, and 0.5 Al fractions are prese
nted. It is shown that the ESR signal observed critically depends on c
ooling steps and that the shallow donor ESR signal can be observed pri
or to illumination. The first ESR study of AlGaAs layers with removed
GaAs substrate are presented. The mechanism of the enhanced photosensi
tivity of the ESR signal is explained. It is found very paradoxical th
at the ESR signals decreases upon the illumination even though shallow
donor concentration is increased.