The development of leak detection as a method of detecting leaks using
penetrating substances is closely linked with new directions in devel
oping gas analytical sensors. These sensors cannot be developed withou
t applying modem microelectronic technology which makes it possible to
produce under mass production conditions large batteries of cheap dev
ices reducing at the same time the energy and material requirement of
analyzers. The combination of these qualities with high sensitivity, s
electivity, and operating speed makes it unsuitable for developing new
and compact leak detectors constructed on microelectronic components.