NANOMETER-SCALE MECHANICS OF GOLD-FILMS

We have used interfacial force microscopy (IFM) to monitor the mechani cal deformation of single nanometer-size grains in Au thin films. Our results show that protruding grains, which represent early-stage delam ination, display multiple deformation mechanisms including grain bound ary sliding and intragranular plasticity. The unprecedented load-displ acement control capability of the IFM provides data that are used for the first time to quantitatively distinguish and evaluate individual d eformation processes.