This review paper presents the applications of x-ray diffraction to ro
utine measurements and the procedures for extending its capabilities o
f analysis to undertake a detailed structural investigation of low-dim
ensional structures. The uses and limitations of the familiar double-c
rystal diffractometer are discussed as are the advantages of 'reciproc
al space mapping' with a multiple-crystal diffractometer. In general x
-ray diffraction has been used for composition and thickness measureme
nt in low-dimensional structures (LDS) and these aspects are covered,
as well as the avoidance of the pitfalls associated with their determi
nation. The possibilities for the use of x-ray diffraction methods to
determine interface quality, the evolution of lattice relaxation, the
detailed microstructure, etc, are discussed, with an indication of the
limits of the techniques.