Ph. Wilson et al., COMPARISON OF QUANTUM-WELL INFRARED PHOTODETECTORS GROWN ON DIFFERENTMOLECULAR-BEAM EPITAXIAL SYSTEMS, Semiconductor science and technology, 8(11), 1993, pp. 2010-2014
A systematic comparison of quantum well infrared photodetectors (QWIPS
) made by different molecular beam epitaxy (MBE) systems is presented.
OWIPS with identical layer specifications were requested from three d
ifferent MBE facilities. Measurements of dark current, detector respon
sivities, infrared absorption and detectivities were carried out. Alth
ough good uniformity between detectors was obtained within the same MB
E wafer, variations were observed between samples with the same specif
ications from different MBE systems. The results of this study illustr
ate the present accuracy Of MBE technology.