SYNTHESIS OF ZR(B,C,N) LAYERS BY MEANS OF PULSED DC-PACVD

Authors
RIE KT GEBAUER A WOHLE J ERKER G SARTER C FRITZE C
Citation
Kt. Rie et al., SYNTHESIS OF ZR(B,C,N) LAYERS BY MEANS OF PULSED DC-PACVD, Materialwissenschaft und Werkstofftechnik, 24(10), 1993, pp. 353-355
Citations number
10
Categorie Soggetti
Material Science
Journal title
Materialwissenschaft und Werkstofftechnik → ACNP
ISSN journal
09335137
Volume
24
Issue
10
Year of publication
1993
Pages
353 - 355
Database
ISI
SICI code
0933-5137(1993)24:10<353:SOZLBM>2.0.ZU;2-R
Abstract
In this study the deposition of Zr(B.C.N) layers by means of low tempe rature (330-degrees-C) pulsed DC plasma assisted CVD process was inves tigated using a metallo-organic compound as precursor being synthesize d in a new way. It is shown that the deposition of Zr(B,C,N) layers is possible with high hardness and adhesion in the investigated paramete r window.