PHOTOADDRESSED SPATIAL LIGHT-MODULATOR USING TRANSMISSIVE AND HIGHLY PHOTOSENSITIVE AMORPHOUS-SILICON CARBIDE FILM

A novel photoaddressed spatial light modulator with a highly photosens itive hydrogenated amorphous-silicon carbide photoreceptor and a ferro electric liquid-crystal layer has been developed that operates in a tr ansmission mode for visible light. The hydrogenated amorphous-silicon carbide photoreceptor shows a high photosensitivity comparable with th at of hydrogenated amorphous silicon, which is prepared by a plasma ch emical vapor deposition method with helium dilution of the source gase s SiH4 and C2H2. An image is input to the photoaddressed spatial light modulator by blue or green light, and an output is read out by red li ght as a transmitted image. The photoaddressed spatial light modulator exhibits a response time of approximately 50 mus and a contrast ratio of 30:1 under a write light (lambda = 565 nm) of 1.5 mW/cm2 intensity and a resolution of 90 line pairs/mm.