TI-SILICIDE WITH IMPROVED THERMAL-STABILITY USING SILICIDATION THROUGH OXIDE ON AMORPHOUS-SILICON SUBSTRATES

Authors
HWANG YS PAEK SH KANG SG CHO HC CHOI JS LEE SI LEE JK LEE JG
Citation
Ys. Hwang et al., TI-SILICIDE WITH IMPROVED THERMAL-STABILITY USING SILICIDATION THROUGH OXIDE ON AMORPHOUS-SILICON SUBSTRATES, Journal of materials science letters, 12(21), 1993, pp. 1726-1728
Citations number
7
Categorie Soggetti
Material Science
Journal title
Journal of materials science letters → ACNP
ISSN journal
02618028
Volume
12
Issue
21
Year of publication
1993
Pages
1726 - 1728
Database
ISI
SICI code
0261-8028(1993)12:21<1726:TWITUS>2.0.ZU;2-W