CHARACTERIZATION OF TIME RESOLUTION IN ELECTRON-BEAM MEASUREMENTS

Authors
GIRARD P LORIVAL R NOUET P
Citation
P. Girard et al., CHARACTERIZATION OF TIME RESOLUTION IN ELECTRON-BEAM MEASUREMENTS, Electronics Letters, 29(18), 1993, pp. 1641-1643
Citations number
9
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
29
Issue
18
Year of publication
1993
Pages
1641 - 1643
Database
ISI
SICI code
0013-5194(1993)29:18<1641:COTRIE>2.0.ZU;2-E
Abstract
A method allowing the determination of time resolution in the electron beam testing of integrated circuits is presented, and experimentally validated. The effect of the extraction field on time resolution is cl early demonstrated. It is also shown that a simple formulation of the transit time effect agrees well with experimental data.