Ly. Krasnobaev et al., THE EFFECT OF FLUORINE ON THE REDISTRIBUTION OF BORON IN ION-IMPLANTED SILICON, Journal of applied physics, 74(10), 1993, pp. 6020-6022
The distributions of B atoms in samples previously implanted with F+ a
nd Ne+ with doses of 1.2 x 10(13) cm-2 and 1.5 x 10(15) cm-2 before an
d after annealing were investigated by secondary ion mass spectrometry
. After annealing at 900-degrees-C, a strong dependence of B redistrib
ution rate on F concentration was shown. The presence of F decreased B
redistribution, while that of Ne (close to F in the periodic table, b
ut inert) did not. When postimplantation annealing was carried out at
1000-degrees-C, the B distribution did not depend on the type of the p
reviously implanted ions. At this temperature F atoms exit the crystal
. The experiment showed that the redistribution of B implanted in Si d
epended on the chemical activity of the impurity present in a crystal
and on its concentration.