DETERMINATION OF INTERFACIAL ROUGHNESS CORRELATION IN W C MULTILAYER FILMS - COMPARISON USING SOFT AND HARD X-RAY-DIFFRACTION/

Interfacial roughness correlation in W/C multilayer films with periods of 23, 30, and 37 angstrom is examined with x-ray diffraction using l ambda in the 10-13 angstrom range and lambda = 1.54 angstrom. Transver se scans through multilayer Bragg reflections are analyzed to determin e the magnitude and lateral correlation length of the component of int erfacial roughness that is perfectly correlated through the multilayer stack. The results are independent of wavelength, even though hard x rays sample much more deeply into the film, indicating that interfacia l roughness is not changing through these films.