AN ULTRAHIGH-VACUUM CZOCHRALSKI CRYSTAL-GROWTH SYSTEM USING EITHER HOT OR COLD CRUCIBLES

Authors
FORT D
Citation
D. Fort, AN ULTRAHIGH-VACUUM CZOCHRALSKI CRYSTAL-GROWTH SYSTEM USING EITHER HOT OR COLD CRUCIBLES, Review of scientific instruments, 64(11), 1993, pp. 3209-3214
Citations number
10
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
Journal title
Review of scientific instruments → ACNP
ISSN journal
00346748
Volume
64
Issue
11
Year of publication
1993
Pages
3209 - 3214
Database
ISI
SICI code
0034-6748(1993)64:11<3209:AUCCSU>2.0.ZU;2-F
Abstract
An ultrahigh vacuum Czochralski crystal growth system intended primari ly for use with metallic elements and intermetallic compounds is descr ibed. The equipment can be used with either hot or cold crucibles and utilizes radio frequency heating. By designing the equipment so that t he crucible is suspended from above, and thereby dispensing with the n ormal pedestal arrangements, it has been possible to employ a simplifi ed design of a vacuum system, which, in tum, permits rapid loading and unloading of samples.