REAL-TIME OPTICAL MONITORING OF SPIN-COATING

Authors
HOROWITZ F YEATMAN E DAWNAY E FARDAD A
Citation
F. Horowitz et al., REAL-TIME OPTICAL MONITORING OF SPIN-COATING, Journal de physique. III, 3(11), 1993, pp. 2059-2063
Citations number
12
Categorie Soggetti
Material Science","Phsycs, Fluid & Plasmas","Physics, Applied
Journal title
Journal de physique. III → ACNP
ISSN journal
11554320
Volume
3
Issue
11
Year of publication
1993
Pages
2059 - 2063
Database
ISI
SICI code
1155-4320(1993)3:11<2059:ROMOS>2.0.ZU;2-E
Abstract
A novel application of optical interferometry, monitoring of spin coat ing, is shown to provide valuable information for the basic understand ing of the process dynamics. This could increase the potential of spin coating for the production of films with required properties. Tempora l evolution of spin-on glass films, in open air and saturated solvent atmospheres, is determined for 10-60 s spinning times.