METHOD OF MEASURING SURFACE ELECTRIC CHAR GE-DISTRIBUTIONS

Authors
CHARPAK G CORDURIE G LEWINER J MORISSEAU D
Citation
G. Charpak et al., METHOD OF MEASURING SURFACE ELECTRIC CHAR GE-DISTRIBUTIONS, Journal de physique. III, 3(11), 1993, pp. 2149-2161
Citations number
10
Categorie Soggetti
Material Science","Phsycs, Fluid & Plasmas","Physics, Applied
Journal title
Journal de physique. III → ACNP
ISSN journal
11554320
Volume
3
Issue
11
Year of publication
1993
Pages
2149 - 2161
Database
ISI
SICI code
1155-4320(1993)3:11<2149:MOMSEC>2.0.ZU;2-W
Abstract
A method of measuring the charge distribution on a dielectric or semic onductor surface is described. The electronic measuring system and the sweeping apparatus are fast enough (5 lines of 400 points by second) to enable charge imaging. Experiments have been performed in various f ields : X ray and gamma ray imaging, detection of alpha particles, evo lution of charge distribution on semiconductor related substrates.