Jh. Selverian et D. Oneil, STRENGTH AND TOUGHNESS MEASUREMENT OF THIN BRITTLE COATINGS ON SUBSTRATES .1. THEORY AND MEASUREMENT, Thin solid films, 235(1-2), 1993, pp. 120-128
Conventional mechanical property measurement techniques usually cannot
be applied to ceramic thin films because of the small amount of mater
ial involved. A method is described to determine the ultimate tensile
strength, fracture toughness, Weibull modulus, and surface energy of m
icron-sized ceramic films on substrates. This technique is based on me
asuring the radius of curvature of a coated substrate at room temperat
ure, and equating the resulting calculated stress with a theoretical s
hear-lag stress distribution model using a force balance.