PULSED ANNEALING OF METAL-FILMS AND METAL-SEMICONDUCTOR SYSTEMS

Authors
CHAPLANOV AM
Citation
Am. Chaplanov, PULSED ANNEALING OF METAL-FILMS AND METAL-SEMICONDUCTOR SYSTEMS, Vacuum, 44(11-12), 1993, pp. 1085-1088
Citations number
11
Categorie Soggetti
Physics, Applied
Journal title
Vacuum → ACNP
ISSN journal
0042207X
Volume
44
Issue
11-12
Year of publication
1993
Pages
1085 - 1088
Database
ISI
SICI code
0042-207X(1993)44:11-12<1085:PAOMAM>2.0.ZU;2-T
Abstract
Structure transformations in metal films under stationary and pulse re gimes of annealing ha ve been compared. Specific features of the phase transformations and electrophysical properties of metal-semiconductor systems after pulse annealing have been considered.