EMISSION PROPERTIES OF AUSISB LIQUID-METAL ION-SOURCE

Authors
DRANDAROV N NIKOLOV B TSVETKOV T KEBEDGIEV A
Citation
N. Drandarov et al., EMISSION PROPERTIES OF AUSISB LIQUID-METAL ION-SOURCE, Vacuum, 44(11-12), 1993, pp. 1105-1107
Citations number
12
Categorie Soggetti
Physics, Applied
Journal title
Vacuum → ACNP
ISSN journal
0042207X
Volume
44
Issue
11-12
Year of publication
1993
Pages
1105 - 1107
Database
ISI
SICI code
0042-207X(1993)44:11-12<1105:EPOALI>2.0.ZU;2-I
Abstract
A liquid metal ion source which produces Si and Sb ions from a AuSiSb alloy has been investigated. Intensive lines of Si2+ and Sb2+ ions, wh ich are very suitable for use in focused ion beam systems, have been i dentified in the mass spectrum of the source. The full width at half m aximum of the energy distribution is evaluated at 15 eV Three emission regions and hysteresis behaviour have been observed in the current-vo ltage characteristics.