R. Chandra et al., DEPOSITION OF YBA2CU3O7-DELTA THIN-FILMS BY DC MAGNETRON SPUTTERING AND STUDY OF RF-SQUID EFFECT, Indian Journal of Pure & Applied Physics, 31(11), 1993, pp. 755-761
Superconducting thin films of YBa2Cu3O7-delta (YBCO) have been deposit
ed on single crystal (100) SrTiO3 and (100) MgO substrates by dc magne
tron sputtering from a single composite (123) target. The films deposi
ted on SrTiO3 (100) substrates show preferred orientation depending on
the substrate temperature during deposition. Both a-axis as well as c
-axis oriented films of YBCO have been deposited on SrTiO3 while the f
ilm is always c-axis oriented on MgO. Post annealing in flowing oxygen
at higher temperature helps in growth of large size grain and also im
proves the electrical properties of the films. rf-SQUID have been fabr
icated on these c-axis oriented films and the SQUID behaviour due to i
ntergrain Josephson weaklink has been observed up to 81.7K. The spectr
al density of flux noise of the rf-SQUID is almost-equal-to 3.8 x 10(-
4) PHI0/square-root Hz at 10 Hz and 77K.